When attempting to install VMWare Workstation 6 (as well as when I attempted to install an evaluation version of 9), the installer fails with an error simplay stating that '~\vmware workstation.msi failed'. This is in 64-bit Windows 7.
I found that stopping after the temp directory gets created and running 'vmware workstation.msi' directly instead of using the already-running installer allowed me to finish the installation.
Do you have Avast! antivirus installed?
That was the cause of my failed installation message. I tried deactivating it for some time and it didn't work. I had to totally uninstall it, install vmware and then reinstall the antivirus.
It won't work if you use the disable feature of the antivirus, you must completely uninstall it.